# The Dual-Use and Related Goods (Export Control) Regulations 1995, Paragraph 157: DEFINITIONS OF TERMS IN THIS ANNEX


“Sputtering” (4) means an overlay coating process wherein positively charged ions are accelerated by an electric field towards the surface of a target (coating material). The kinetic energy of the impacting ions is sufficient to cause target surface atoms to be released and deposited on the substrate.
N.B.: Triode, magnetron or radio frequency sputtering to increase adhesion of coating and rate of deposition are ordinary modifications of the process.

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Source: https://www.legislation.gov.uk/uksi/1995/271/schedule/1/paragraph/157 (the official version)
Page: https://openlegislation.uk/dual-use-and-related-goods-export-control-regulations-1995/schedule-1/paragraph-157
Contains public sector information licensed under the Open Government Licence v3.0. Source: legislation.gov.uk, The National Archives.