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Division [3D003] ‘Computational lithography’"software" specially designed for the "development" of patterns on EUV-lithography masks or reticles.F1

Changes not yet applied. Later legislation changes this provision in ways not yet written into the text below:

Technical Note:

F2For the purposes of 3D003, ‘computational lithography’ is the use of computer modelling to predict, correct, optimise and verify imaging performance of the lithography process over a range of patterns, processes, and system conditions.

Annotations

Textual amendments

F1

Substituted by Commission Delegated Regulation (EU) 2020/1749 of 7 October 2020 amending Council Regulation (EC) No 428/2009 setting up a Community regime for the control of exports, transfer, brokering and transit of dual-use items.

F2

Words in Annex 1 Entry 3D003 substituted (13.7.2023) by The Export Control (Amendment) Regulations 2023 (S.I. 2023/695), regs. 1(1), 3(2)(e)(xxxi)