# The Export of Goods (Control) Order 1994, Paragraph 3C: Equipment, Assemblies and Components


Materials
3C001 Hetero-epitaxial materials consisting of a substrate with stacked epitaxially grown multiple layers of:
a. Silicon;
b. Germanium; or
c. III/V compounds of gallium or indium.
Note: III/V compounds are polycrystalline or binary or complex monocrystalline products consisting of elements of groups IIIA and VA of Mendeleyev’s periodic classification table (gallium arsenide, gallium-aluminium arsenide, indium phosphide, etc.).
3C002 Resist materials, as follows, and substrates coated with controlled resists:
a. Positive resists for semiconductor lithography specially adjusted (optimised) for use at wavelengths below 370 nm;
b. All resists, for use with electron beams or ion beams, with a sensitivity of 0.01 microcoulomb/mm2 or better;
c. All resists, for use with X-rays, with a sensitivity of 2.5 mJ/mm2 or better;
d. All resists optimized for surface imaging technologies, including silylated resists.
Note: Silylation techniques are defined as processes incorporating oxidation of the resist surface to enhance performance for both wet and dry developing.
3C003 Organo-inorganic compounds as follows:
a. Organo-metallic compounds of aluminium, gallium or indium, having a purity (metal basis) better than 99.999%;
b. Organo-arsenic, organo-antimony and organo-phosphorus compounds having a purity (inorganic element basis) better than 99.999%.
Note: This entry only specifies compounds whose metallic, partly metallic or non-metallic element is directly linked to carbon in the organic part of the molecule.
3C004 Hydrides of phosphorus, arsenic or antimony, having a purity better than 99.999%, even diluted in inert gases or hydrogen.
Note: This entry does not specify hydrides containing 20% molar or more of inert gases or hydrogen.

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Source: https://www.legislation.gov.uk/uksi/1994/1191/schedule/1/paragraph/3C (the official version)
Page: https://openlegislation.uk/export-of-goods-control-order-1994/schedule-1/paragraph-3C
Contains public sector information licensed under the Open Government Licence v3.0. Source: legislation.gov.uk, The National Archives.