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Paragraph 3C Equipment, Assemblies and Components

Changes not yet applied. Later legislation changes this provision in ways not yet written into the text below:

Materials

3C001

Hetero-epitaxial materials consisting of a substrate with stacked epitaxially grown multiple layers of:

a.

Silicon;

b.

Germanium; or

c.

III/V compounds of gallium or indium.

  • Note: III/V compounds are polycrystalline or binary or complex monocrystalline products consisting of elements of groups IIIA and VA of Mendeleyev’s periodic classification table (gallium arsenide, gallium-aluminium arsenide, indium phosphide, etc.).

3C002

Resist materials, as follows, and substrates coated with controlled resists:

a.

Positive resists for semiconductor lithography specially adjusted (optimised) for use at wavelengths below 370 nm;

b.

All resists, for use with electron beams or ion beams, with a sensitivity of 0.01 microcoulomb/mm2 or better;

c.

All resists, for use with X-rays, with a sensitivity of 2.5 mJ/mm2 or better;

d.

All resists optimized for surface imaging technologies, including silylated resists.

  • Note: Silylation techniques are defined as processes incorporating oxidation of the resist surface to enhance performance for both wet and dry developing.

3C003

Organo-inorganic compounds as follows:

a.

Organo-metallic compounds of aluminium, gallium or indium, having a purity (metal basis) better than 99.999%;

b.

Organo-arsenic, organo-antimony and organo-phosphorus compounds having a purity (inorganic element basis) better than 99.999%.

  • Note: This entry only specifies compounds whose metallic, partly metallic or non-metallic element is directly linked to carbon in the organic part of the molecule.

3C004

Hydrides of phosphorus, arsenic or antimony, having a purity better than 99.999%, even diluted in inert gases or hydrogen.

  • Note: This entry does not specify hydrides containing 20% molar or more of inert gases or hydrogen.