Paragraph 3C Equipment, Assemblies and Components
Materials
Hetero-epitaxial materials consisting of a substrate with stacked epitaxially grown multiple layers of:
Silicon;
Germanium; or
III/V compounds of gallium or indium.
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Note: III/V compounds are polycrystalline or binary or complex monocrystalline products consisting of elements of groups IIIA and VA of Mendeleyev’s periodic classification table (gallium arsenide, gallium-aluminium arsenide, indium phosphide, etc.).
Resist materials, as follows, and substrates coated with controlled resists:
Positive resists for semiconductor lithography specially adjusted (optimised) for use at wavelengths below 370 nm;
All resists, for use with electron beams or ion beams, with a sensitivity of 0.01 microcoulomb/mm2 or better;
All resists, for use with X-rays, with a sensitivity of 2.5 mJ/mm2 or better;
All resists optimized for surface imaging technologies, including silylated resists.
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Note: Silylation techniques are defined as processes incorporating oxidation of the resist surface to enhance performance for both wet and dry developing.
Organo-inorganic compounds as follows:
Organo-metallic compounds of aluminium, gallium or indium, having a purity (metal basis) better than 99.999%;
Organo-arsenic, organo-antimony and organo-phosphorus compounds having a purity (inorganic element basis) better than 99.999%.
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Note: This entry only specifies compounds whose metallic, partly metallic or non-metallic element is directly linked to carbon in the organic part of the molecule.
Hydrides of phosphorus, arsenic or antimony, having a purity better than 99.999%, even diluted in inert gases or hydrogen.
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Note: This entry does not specify hydrides containing 20% molar or more of inert gases or hydrogen.